Two thin film shape memory alloy microactuators

Thin film shape memory alloys and microactuators

For Micro-electro-mechanical System (MEMS) applications, TiNi-based thin film Shape Memory Alloys (SMAs) possess many desirable properties, such as high power density, large transformation stress and strain upon heating and cooling, superelasticity and biocompatibility. In this paper, recent development in TiNi-based thin film SMA and microactuator Thin film SMAs and microactuators 209 applicat...

Thin Film Shape Memory Alloys

s of chapters xviii 1 Overview of sputter-deposited TiNi based thin films 1 Abstract 1 1.

Thin film shape memory composites

Magnetic Shape Memory Microactuators

By introducing smart materials in micro systems technologies, novel smart microactuators and sensors are currently being developed, e.g., for mobile, wearable, and implantable MEMS (Micro-electro-mechanical-system) devices. Magnetic shape memory alloys (MSMAs) are a promising material system as they show multiple coupling effects as well as large, abrupt changes in their physical properties, e....

High-throughput screening of shape memory alloy thin-film spreads using nanoindentation

We have demonstrated the utility of nanoindentation as a rapid characterization tool for mapping shape memory alloy compositions in combinatorial thin-film libraries. Nanoindentation was performed on Ni–Mn–Al ternary composition spreads. The indentation hardness and the reduced elastic modulus were mapped across a large fraction of the ternary phase diagram. The large shape memory alloy composi...